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Lamp Heating Device Product List

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Lamp heating device (Model SHM-01)

Lamp heating device (Model SHM-01)

This is a device for heating φ300mm bonded wafers using an IR lamp.

- Manual/automatic switching and arbitrary temperature adjustment are possible. - The heating temperature can rise up to a maximum of 500℃.

  • Other semiconductor manufacturing equipment
  • Lamp Heating Device

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